Semiconductor process consumables

Quartz crucibles are translucent or transparent containers made from high-purity quartz sand using a high-temperature electric arc melting process. They are key consumables in the semiconductor single-crystal silicon growth process. Quartz crucibles possess extremely high purity, excellent high-temperature strength, and good thermal stability. They are mainly used in Czochralski single-crystal growth furnaces to hold polycrystalline silicon raw materials, melting the silicon material into a silicon melt at temperatures exceeding 1400 degrees Celsius, providing a clean melt environment for pulling single-crystal silicon rods. Quartz crucibles are divided into two main categories: synthetic quartz crucibles and natural quartz crucibles. Synthetic quartz crucibles have higher purity and lower hydroxyl content, making them suitable for the pulling process of large-size single-crystal silicon. Our company's quartz crucibles are manufactured using imported high-purity quartz sand as raw material, through advanced electric arc melting equipment and clean production processes. The product purity can reach over 99.99%, and the size range covers the needs of 8-inch to 32-inch single-crystal furnaces.

High-purity graphite parts are core components in semiconductor manufacturing processes, made from high-purity graphite as the base material through precision machining. High-purity graphite refers to graphite materials with a carbon content ≥99.99%, possessing advantages such as high strength, high density, high temperature resistance, oxidation resistance, excellent electrical and thermal conductivity, good thermal shock resistance, self-lubrication, corrosion resistance, and ease of precision machining. In the semiconductor industry, high-purity graphite parts are mainly used in key process stages such as single crystal growth furnace thermal systems, epitaxial equipment, ion implanters, and etching equipment. Specific product forms include graphite crucibles, graphite heaters, graphite electrodes, graphite boats, graphite susceptors, graphite shields, graphite nozzles, and graphite liners.